Ion Energy Distributions in Silane-Hydrogen Plasmas
- Author(s):
- Publication title:
- Amorphous silicon technology, 1996 : symposium held April 8-12, 1996, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 420
- Pub. Year:
- 1996
- Page(from):
- 461
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993235 [1558993231]
- Language:
- English
- Call no.:
- M23500/420
- Type:
- Conference Proceedings
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