Blank Cover Image

Investigation of the Amorphous to Nanocrystalline Phase Transition at the Deposition of Silicon Films in an ECWR Plasma of Pure SiH4

Author(s):
Publication title:
Amorphous silicon technology, 1996 : symposium held April 8-12, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
420
Pub. Year:
1996
Page(from):
437
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993235 [1558993231]
Language:
English
Call no.:
M23500/420
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings In Situ Ellipsometric Studies of the Growth of a-Si:H Films Prepared by the Hot Wire Deposition

Bauer, S., Dusane, R. O., Biehl, R., Schroder, B., Oechsner, H.

MRS - Materials Research Society
7 Conference Proceedings Amorphous Silicon Films from Dichlorosilane and SiH4 for Solar Cells

Payne, A. M., Wagner, S.

MRS - Materials Research Society
2 Conference Proceedings The Origin of the Enhanced Optical Absorption in Hot Wire Microcrystalline Silicon

Diehl, F., Schroder, B., Oechsner, H.

MRS - Materials Research Society
8 Conference Proceedings Amorphous Silicon Films from Dichlorosilane and SiH4 for Solar Cells

Payne, A. M., Wagner, S.

MRS - Materials Research Society
3 Conference Proceedings Deposition of Photoluminescent Nanocrystalline Silicon Films by SiF4-SiH4-H2 Plasmas

Cicala, G., Bruno, G., Capezzuto, P., Schiavulli, L., Capozzi, V., Perna, G.

MRS - Materials Research Society
9 Conference Proceedings On the Initial Cubic Phase Nucleation in Boron Nitride Films

Ye,J., Oechsner,H.

Trans Tech Publications
4 Conference Proceedings Enhancement of the Amorphous to Microcrystalline Phase Transition in Silicon Films Deposited by SiF4-H2-He Plasmas

Cicala, G., Losurdo, M., Capezzuto, P., Bruno, G., Ligonzo, T., Schiavulli, L., Minarini, C., Rossi, M. C.

MRS - Materials Research Society
10 Conference Proceedings Fabrication of Nanocrystalline Si by SiH4 Plasma Cell

Otobe, M., Kanai, T., Oda, S.

MRS - Materials Research Society
5 Conference Proceedings PIEZOELECTRIC EFFECT ON PLASMA CHEMICAL VAPOR DEPOSITION OF HYDROGENATED AMORPHOUS SILICON FILMS

Kawasaki, M., Sumiya, M., Koinuma, H.

Materials Research Society
11 Conference Proceedings Effect of Filament Bias on the Properties of Amorphous and Nanocrystalline Silicon From Hot-Wire Chemical Vapor Deposition

Wanka, H. N., Bruggemann, R., Kohler, C., Zrinscak, I., Schubert, M. B.

MRS - Materials Research Society
6 Conference Proceedings Microwave Plasma CVD of Silicon Nanocrystalline and Amorphous Silicon as a Function of Deposition Conditions

Jeung, J-H., Lee, Hak-Gue, Teng, Lihong, Anderson, W.A.

Materials Research Society
12 Conference Proceedings Study of Silicon Nitride Films Deposited by Plasma Enhanced Chemical Vapour Deposition (PECVD) U sing 2% SiH4/N2-With and Without He

Dayal, S., Raman, R., Gulati, R., Vyas, H.P., Kumar, K.C., Rao, A.V.S.K., Govindacharyulu, P.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12