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Simulation Studies of TiN PVD and CVD Thin Films for Contact/Via Liners

Author(s):
Bang, D. S.
Mcvittie, J. P.
Saraswat, K. C.
Iacoponi, J. A.
Gray, J.
Krivokapic, Z.
Littau, K. A.
2 more
Publication title:
Modeling and simulation of thin-film processing : symposium held April 17-20, 1995, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
389
Pub. Year:
1995
Page(from):
173
Pub. info.:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992924 [1558992928]
Language:
English
Call no.:
M23500/389
Type:
Conference Proceedings

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