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DEVELOPMENT AND IMPLEMENTATION OF LARGE AREA, ECONOMICAL ROTATING DISK REACTOR TECHNOLOGY FOR METALORGANIC CHEMICAL VAPOR DEPOSTION

Author(s):
Tompa, G. S.
Zawadzki, P. A.
McKee, M.
Wolak, E.
Moy, K.
Stall, R. A.
Gurary, A.
Schumaker, N. E.
3 more
Publication title:
Metal-organic chemical vapor deposition of electronic ceramics : Symposium held on November 29-December 3, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
335
Pub. Year:
1994
Page(from):
241
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992344 [1558992340]
Language:
English
Call no.:
M23500/335
Type:
Conference Proceedings

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