Blank Cover Image

Advanced model for resist heating effect simulation in electron-beam lithography

Author(s):
Publication title:
16th Annual BACUS Symposium on Photomask Technology and Management
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2884
Pub. date:
1996
Page(from):
520
Page(to):
526
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422828 [0819422827]
Language:
English
Call no.:
P63600/2884
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Simulation of resist heating in electron-beam lithography

Babin,S.V., Kuzmin,I.Yu.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Resist heating dependence on subfield scheduling in 50-kV electron beam maskmaking

Babin, S.V., Kahng, A.B., Mandoiu, I., Muddu, S.V.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Software tool for temperature simulation in electron-beam lithography: TEMPTATION

Babin,S.V., Kuzmin,I.Yu., Sergeev,G.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Comprehensive simulation of e-beam lithography processes using PROLITH/3D and TEMPTATION software tools

Kuzmin,I.YU., Mack,C.A.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Simulation of resist heating using TEMPTATION software with different models of electron-beam energy deposition

Kuzmin,I.Yu.

SPIE - The International Society for Optical Engineering
9 Conference Proceedings EBL resist heating error and its correction [6283-21]

Babin, S., Kuzmin, I.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Comparative study of resist heating and proximity effect influence on CD variation in 30-kV EBL

Babin,S.V., Hudek,P., Kostic,I., Kuzmin,I.Yu.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Dry resist technology to fabricate optimized microlenses centered to the end of a monomode fiber with electron-beam lithography

Babin,S.V., Weber,M., Koops,H.W.P.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings CD variation in 30-kV EBL due to resist heating:experiment and simulation

Babin,S.V., Hudek,P., Kostic,I., Kuzmin,I.Yu.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Photomask fabrication of focusing diffractive optical elements using electron-beam lithography

S.V. Babin, V.A. Danilov

Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings Throughput optimization of electron-beam lithography in photomask fabrication regarding acceptable accuracy of critical dimensions

Babin,S.V., Kuzmin,I.Y.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Comparison of writing strategies subject to resist heating

Babin,S.V.

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12