Blank Cover Image

FIB repair of opaque defects for 64-Mb-DRAM-level binary masks

Author(s):
Lee,K.H. ( Samsung Electronics Co.Ltd. )
Cho,H.K.
Park,J.H.
Kim,Y.H.
Yoon,H.S.
Sohn,J.M.
1 more
Publication title:
16th Annual BACUS Symposium on Photomask Technology and Management
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2884
Pub. date:
1996
Page(from):
442
Page(to):
453
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422828 [0819422827]
Language:
English
Call no.:
P63600/2884
Type:
Conference Proceedings

Similar Items:

Kim,Y.H., Park,J.H., Lee,K.H., Cho,H.K., Yoon,H.S.

SPIE-The International Society for Optical Engineering

Choi, Y., Kim, H., Kim, S., Han, O.

SPIE - The International Society of Optical Engineering

Kim,Y.H., Park,J.H., Lee,K.H., Choi,S.W., Yoon,H.S., Sohn,J.M.

SPIE-The International Society for Optical Engineering

Park, J.G., Park, J.M., Cho, K.C., Lee, G.S., Chung, H.K.

Electrochemical Society

Park,J.H., Cho,H.-K., Kim,Y.-H., Lee,K.-H., Yoon,H.-S.

SPIE-The International Society for Optical Engineering

Goo, D.-H., Kim, B.-S., Park, J.-S., Yoon, K.-S., Lee, J.-H., Cho, H.-K., Han, W.-S., Moon, J.-T.

SPIE-The International Society for Optical Engineering

Sohn,J.M., Choi,S.W., Kim,B.G., Cho,H.K., Yoon,H.S.

SPIE-The International Society for Optical Engineering

Choi, Y.-H., Park, J.R., Sung, M.-G., Yang, S.-H., Kim, S.-H., Lee, H.-J., Lee, J.-Y., Jang, I.Y., Kim, Y.H., Choi, …

SPIE-The International Society for Optical Engineering

Satoh,Y., Nakamura,H., Fujikawa,J., Tsuchiya,K., Noguchi,S., Aita,K., Yasaka,A.

SPIE-The International Society for Optical Engineering

Casey,J.D.,Jr., Doyle,A.F., Stewart,D.K., Ferranti,D.C., Raphaelian,M.L., Morgan,J.C.

SPIE-The International Society for Optical Engineering

J.K. Park, W.S. Choi, H.S. Hwang, K.H. Lee, J.H. Kim, Y.H. Joung

Trans Tech Publications

Park, J., Kim, -S. S., Lee, S., Woo, -G. S., Cho, -K. H., Moon, -T. J.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12