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Analysis of Dielectric Constants to Determine sp3/sp2 Ratio in Hydrogenated Amorphous Carbon Films

Author(s):
Verma,B.S.
Basu,A.
Panwar,O.S.
Dixit,P.N.
Sarangi,D.
Kar,M.
Bhattacharyya,R.
2 more
Publication title:
Semiconductor Devices
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2733
Pub. Year:
1996
Page(from):
430
Page(to):
432
Pub. info.:
Bellingham, WA — New Delhi: SPIE-The International Society for Optical Engineering — Narosa
ISSN:
0277786X
ISBN:
9780819421142 [0819421146]
Language:
English
Call no.:
P63600/2733
Type:
Conference Proceedings

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