Integrated mold/surface-micromachining process

Integrated mold/surface-micromachining process

Author(s):

Publication title:

Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2722

Pub. Year:

1996

Page(from):

30

Page(to):

35

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420978 [0819420972]

Language:

English

Call no.:

P63600/2722

Type:

Conference Proceedings

Details

TDL ID:	ZA00018407
Series ID:	PA00000029
Conf. info. (Name):	Smart Structures and Materials
Conf. info. (Number):	1996
Conf. info. (Venue):	San Diego, CA. USA
Conf. info. (Date):	1996.01.28-1996.01.29

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