Detailed Modeling of Barrel Chemical Vapor Deposition Reactors
- Author(s):
- Publication title:
- Advances in Crystal Growth : proceedings of the Meeting "Italian Crystal Growth" held in Brindisi, Italy, March 15-19, 1995
- Title of ser.:
- Materials science forum
- Ser. no.:
- 203
- Pub. Year:
- 1996
- Page(from):
- 203
- Page(to):
- 208
- Pub. info.:
- Aedermannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878497188 [0878497188]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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