Growth of Si:H Thin Films by Hot Filament CVD:u-Crystalline to amorphous Transition.

Growth of Si:H Thin Films by Hot Filament CVD:u-Crystalline to amorphous Transition.

Author(s):

Polini,R.

Publication title:

Advances in Crystal Growth : proceedings of the Meeting "Italian Crystal Growth" held in Brindisi, Italy, March 15-19, 1995

Title of ser.:

Materials science forum

Ser. no.:

203

Pub. Year:

1996

Page(from):

167

Page(to):

172

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878497188 [0878497188]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00018362
Series ID:	PA00000012
Conf. info. (Name):	Italian Crystal Growth Meeting
Conf. info. (Number):	1995
Conf. info. (Venue):	Brindisi,Italy
Conf. info. (Date):	1995.03.15-1995.03.19

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