Defect Distribution Across 6-Inch CZ-Silicon Wafers
- Author(s):
- Publication title:
- Positron annihilation : Proceedings of the 9th International Conference on Positron Annihilation, August 26-31, 1991, Szombathely, Hungary
- Title of ser.:
- Materials science forum
- Ser. no.:
- 105-110
- Pub. Year:
- 1992
- Vol.:
- Pt.2
- Page(from):
- 1185
- Page(to):
- 1188
- Pub. info.:
- Aederlmannsdorf, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878496365 [087849636x]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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