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Precision materials processing in microelectronics with a 10-W copper-bromide laser

Author(s):
Mizeraczyk,J. ( Inst.of Fluid Flow Machinery,Gdansk )
Otta,A. ( Inst.of Fluid Flow Machinery,Gdansk )
Mohamed-Seghir,M. ( Inst.of Fluid Flow Machinery,Gdansk )
Wasilewski,J. ( Inst.of Fluid Flow Machinery,Gdansk )
Jurewicz,A. ( Tech.Univ.of Gdansk,Poland. )
Janke,W. ( Tech.Univ.of Gdansk,Poland. )
Little,C.E. ( University of St.Andrews,UK )
Sabotinov,N. ( Inst.of Solid State Physics,Sofia,Bulgaria )
Livingstone,E.S. ( EEV,UK. )
Kostadinov,I. ( Pulssvet Co.,Sofia,Bulgaria )
5 more
Publication title:
XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference : 25-30 August 1996, Heriot-Watt University, Edinburgh, UK
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3092
Pub. date:
1997
Page(from):
277
Page(to):
280
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819425072 [0819425079]
Language:
English
Call no.:
P63600/3092
Type:
Conference Proceedings

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