Precision materials processing in microelectronics with a 10-W copper-bromide laser
- Author(s):
Mizeraczyk,J. ( Inst.of Fluid Flow Machinery,Gdansk ) Otta,A. ( Inst.of Fluid Flow Machinery,Gdansk ) Mohamed-Seghir,M. ( Inst.of Fluid Flow Machinery,Gdansk ) Wasilewski,J. ( Inst.of Fluid Flow Machinery,Gdansk ) Jurewicz,A. ( Tech.Univ.of Gdansk,Poland. ) Janke,W. ( Tech.Univ.of Gdansk,Poland. ) Little,C.E. ( University of St.Andrews,UK ) Sabotinov,N. ( Inst.of Solid State Physics,Sofia,Bulgaria ) Livingstone,E.S. ( EEV,UK. ) Kostadinov,I. ( Pulssvet Co.,Sofia,Bulgaria ) - Publication title:
- XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference : 25-30 August 1996, Heriot-Watt University, Edinburgh, UK
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3092
- Pub. Year:
- 1997
- Page(from):
- 277
- Page(to):
- 280
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819425072 [0819425079]
- Language:
- English
- Call no.:
- P63600/3092
- Type:
- Conference Proceedings
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