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60J XeCl laser for single-shot excimer laser annealing

Author(s):
Godard,B. ( SOPRA,Bois-Colombes )
Laborde,P. ( SOPRA,Bois-Colombes )
Dutems,C. ( SOPRA,Bois-Colombes )
Prochasson,S. ( SOPRA,Bois-Colombes )
Zahorski,D. ( SOPRA,Bois-Colombes )
Stehle,M. ( SOPRA,Bois-Colombes )
Bonnet,J. ( ONERA,Palaiseau,France )
Pigache,D. ( ONERA,Palaiseau,France )
3 more
Publication title:
XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference : 25-30 August 1996, Heriot-Watt University, Edinburgh, UK
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3092
Pub. Year:
1997
Page(from):
161
Page(to):
164
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819425072 [0819425079]
Language:
English
Call no.:
P63600/3092
Type:
Conference Proceedings

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