Beamline for metrology of x-ray/EUV optics at the Advances Light Source (Invited Paper)

Beamline for metrology of x-ray/EUV optics at the Advances Light Source (Invited Paper)

Author(s):

Underwood,J.H. ( Lawrence Berkeley National Lab. )
Gullikson,E.M. ( Lawrence Berkeley National Lab. )
Koike,M. ( Lawrence Berkeley National Lab. )
Batson,P.J. ( Lawrence Berkeley National Lab. )

Publication title:

Grazing incidence and multilayer X-ray optical systems : 27-29 July 1997, San Diego, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3113

Pub. Year:

1997

Page(from):

214

Page(to):

221

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819425355 [0819425354]

Language:

English

Call no.:

P63600/3113

Type:

Conference Proceedings

Details

TDL ID:	ZA00018337
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Grazing Incidence and Multilayer X-Ray Optical Systems
Conf. info. (Number):	1997
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	1997.07.27-1997.07.29

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