Design of imaging system for EUVL

Design of imaging system for EUVL

Author(s):

Kinoshita,H. ( Himeji Institute of Technology (Japan) )
Watanabe,T. ( Himeji Institute of Technology (Japan) )
Koike,M. ( Japan Atomic Energy Research Institute )
Namioka,T. ( Tohoku Univ.(Japan) )

Publication title:

Materials, manufacturing, and measurement for synchrotron radiation mirrors : 30-31 July 1997, San Diego, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3152

Pub. Year:

1997

Page(from):

211

Page(to):

220

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819425744 [0819425745]

Language:

English

Call no.:

P63600/3152

Type:

Conference Proceedings

Details

TDL ID:	ZA00018333
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors
Conf. info. (Number):	1997
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	1997.07.30-1997.07.31

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