Characterization of polymer formation during Si02 etching with different fluorocarbon gases (CHF3,CF4,C4F8)

Characterization of polymer formation during Si02 etching with different fluorocarbon gases (CHF3,CF4,C4F8)

Author(s):

Loong,S.Y. ( National University of Singapore )

Lee,H.K. ( National University of Singapore )

Chan,L.H. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )

Zhou,M.S. ( Chartered Semiconductor Manufacturing Ltd. (Singapore) )

Loh,F.C. ( National University of Singapore )

Tan,K.L. ( National University of Singapore )

1 more

Publication title:

Microelectronic Device Technology : 1-2 October 1997, Austin, Texas

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3212

Pub. Year:

1997

Page(from):

376

Page(to):

382

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426444 [081942644X]

Language:

English

Call no.:

P63600/3212

Type:

Conference Proceedings

Details

TDL ID:	ZA00018328
Series ID:	PA00000029
Conf. info. (Name):	Microelectronic Manufacturing : Microelectronic Device Technology
Conf. info. (Number):	1997
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1997.10.01-1997.10.02

Similar Items:

1 Conference Proceedings Characterization of pattern density and the metal stack composition on chlorine residues from the metal etch process Loong,S.Y., Lee,H.K., Zhou,M.S., Chan,L.H., Premachandran,V. SPIE-The International Society for Optical Engineering	7 Technical Paper Transonic flow field around the CF-18 wing at angle of attack 4.5° Tang, F.C., Jiang, L.Y., Ohman, L.H. American Institute of Aeronautics and Astronautics
2 Conference Proceedings Evaluation of 02- and N2- Addition in Via Etching and CHF3/02 Post Etch Treatment Ho, C.N., Higelin, G., Low, C.H., See, A., Chan, L., Chua, D.H.C. Electrochemical Society	8 Conference Proceedings High-density plasma FSG charging damage Ang,T.C., Tse,M.S., Loong,S.Y., Wong,Y.C., Loh,W.B. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Effect of different barrier materials on antifuse performance Ang,T.C., Tse,M.S., Chan,L.H., Sudijono,J.L. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Effect of argon or nitrogen preamorphized implant on SALICIDE formation for deep submicron CMOS technology Ho,C.S., Pey,K.L., Wong,H., Karunasiri,R.P.G., Chua,S.J., Lee,K.H., Tang,Y., Wong,S.M., Chan,L.H. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Fabrication of bandgap-tuned lasers in GaAS/AlGaAs Structure using sol-gel Si02-induced quantum well intermixing Lee,L.H., Gunawan,O., Ooi,B.S., Zhou,Y., Chan,Y.C., Lam,Y.L. SPIE - The International Society for Optical Engineering	10 Conference Proceedings Positron Annihilation in Molecular and Biological Systems Deng,O., Sung,S., Mahmood,T., Zhou,G.M., Lu,X., Shen,S.Y., Cheng,K.L., Hellmuth,E.W., Tsai,C.F., Jean,Y.C., Lou,M.F. Trans Tech Publications
5 Conference Proceedings Direct Formation of C54 Phase on the Basis of C40 TiSi2 and Its Applications in Deep Sub-Micron Technology Chen, S.Y., Shen, Z.X., Xu, S.Y., See, A.K., Chan, L.H., Li, W.S. Materials Research Society	11 Conference Proceedings Doping Concentration and Surface Morphology of 4H-SiC C-Face Epitaxial Growth K.Y. Lee, S.Y. Lee, C.F. Huang Trans Tech Publications
6 Conference Proceedings Effects of Process Conditions on the Performance of Large Grain Poly-Silicon On Insulator (LPSOI) MOSFET for Advanced CMOS Applications Shivani, S., Ng, K.L., Cheng, C.F., Poon, M.C., Chan, Mansum Materials Research Society	12 Conference Proceedings Loading Rate Sensitivity of Fracture Absorption Energy of Bainitic-Austenitic TRIP Steel Q. Zhou, L.H. Qian, J.Y. Meng, L.J. Zhao, F.C. Zhang Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12