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Scaling self-aligned contacts for 0.25ヲフ m and below

Author(s):
Perera,A. ( Motorola )
Pfiester,J.R. ( Hewlett-Packard Co. )
Lii,T. ( Motorola )
Feng,C. ( Semiconductor Technology Lab. )
Bhat,M. ( Motorola )
Dao,T. ( Semiconductor Technology Lab. )
Molloy,J. ( Semiconductor Technology Lab. )
Blackwell,M. ( Motorola )
J. Cecil, ( Motorola )
4 more
Publication title:
Microelectronic Device Technology : 1-2 October 1997, Austin, Texas
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3212
Pub. date:
1997
Page(from):
171
Page(to):
175
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426444 [081942644X]
Language:
English
Call no.:
P63600/3212
Type:
Conference Proceedings

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