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Characterization and application of jet-printed thin PZT layers for actuation of MEMS

Author(s):
  • Schroth,A. ( Mechanical Engineering Lab. (Japan) )
  • Ichiki,M. ( Mechanical Engineering Lab. (Japan) )
  • Maeda,R. ( Mechanical Engineering Lab. (Japan) )
  • Akedo,J. ( Mechanical Engineering Lab. (Japan) )
Publication title:
Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3242
Pub. date:
1997
Page(from):
380
Page(to):
387
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426802 [0819426806]
Language:
English
Call no.:
P63600/3242
Type:
Conference Proceedings

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