Deposition of PZT thin films by pulsed laser ablation for MEMS application

Deposition of PZT thin films by pulsed laser ablation for MEMS application

Author(s):

Maeda,R. ( Mechanical Engineering Lab. (Japan) )
Kikuchi,K.M. ( Mechanical Engineering Lab. (Japan) )
Schroth,A. ( Mechanical Engineering Lab. (Japan) )
Umezawa,A. ( Mechanical Engineering Lab. (Japan) )
Masumoto,S. ( Mechanical Engineering Lab. (Japan) )

Publication title:

Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3242

Pub. Year:

1997

Page(from):

372

Page(to):

379

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426802 [0819426806]

Language:

English

Call no.:

P63600/3242

Type:

Conference Proceedings

Details

TDL ID:	ZA00018325
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Smart electronics and MEMS
Conf. info. (Number):	1997
Conf. info. (Venue):	Adelaide, Australia
Conf. info. (Date):	1997.12.11-1997.12.13

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