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Manufacture of miniature bioparticle electromanipulators by excimer laser ablation

Author(s):
Gower,M.C. ( Exitech Ltd. (UK) )
Harvey,E.C. ( Exitech Ltd. (UK) )
Rizvi,N.H. ( Exitech Ltd. (UK) )
Rumsby,P.T. ( Exitech Ltd. (UK) )
Burt,J.P.H. ( Univ.of Wales Bangor (UK) )
Talary,M.S. ( Univ.of Wales Bangor (UK) )
Tame,J.A. ( Univ.of Wales Bangor (UK) )
Pethig,R. ( Univ.of Wales Bangor (UK) )
3 more
Publication title:
Laser Applications in Microelectronic and Optoelectronic Manufacturing III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3274
Pub. Year:
1998
Page(from):
152
Page(to):
160
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427137 [0819427136]
Language:
English
Call no.:
P63600/3274
Type:
Conference Proceedings

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