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Energy coupling to materials ablated by intensive pulsed 1-ｦﾌm radiation: plasma shielding and surface-modification effects

Author(s):
Konov,V.I. ( General Physics Institute (Russia) )
Carnov,S.V. ( General Physics Institute (Russia) )
Klimentov,S.M. ( General Physics Institute (Russia) )
Kononenko,T.V. ( General Physics Institute (Russia) )
Tsarkova,O.G. ( General Physics Institute (Russia) )
Dausinger,F. ( Univ.of Stuttgart (FRG) )
1 more
Publication title:
Laser Applications in Microelectronic and Optoelectronic Manufacturing III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3274
Pub. Year:
1998
Page(from):
141
Page(to):
149
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427137 [0819427136]
Language:
English
Call no.:
P63600/3274
Type:
Conference Proceedings

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