Control of a drop ejector used as a photoresist dispenser

Control of a drop ejector used as a photoresist dispenser

Author(s):

Roche,P.-E. ( Stanford Univ. )
Hansson,A. ( Stanford Univ. )
Khuri-Yakub,B.T. ( Stanford Univ. )

Publication title:

Smart structures and materials 1998 : mathematics and control in smart structures : 2-5 March 1998, San Diego, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3323

Pub. Year:

1998

Page(from):

446

Page(to):

454

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427670 [0819427675]

Language:

English

Call no.:

P63600/3323

Type:

Conference Proceedings

Details

TDL ID:	ZA00018318
Series ID:	PA00000029
Conf. info. (Name):	Smart Structures and Materials
Conf. info. (Number):	1998
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	1998.03.02-1998.03.05

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