Computational and experimental study of spin coater air flow

Author(s):

• Zhu,X. ( FSI International,Inc. )
• Liang,F. ( FSI International,Inc. )
• Haji-Sheikh,A. ( Univ.of Texas at Arlington )
• Ghariban,N. ( Univ.of Texas at Arlington )

Publication title:

Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3333

Pub. Year:

1998

Vol.:

Part 2

Page(from):

1441

Page(to):

1451

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427786 [0819427780]

Language:

English

Call no.:

P63600/3333

Type:

Conference Proceedings