Blank Cover Image

Line-edge roughness in sub-0.18-ヲフm resist patterns

Author(s):
Palmateer,S.C. ( MIT Lincoln Lab. )
Cann,S.G. ( MIT Lincoln Lab. )
Curtin,J.E. ( MIT Lincoln Lab. )
Doran,S.P. ( MIT Lincoln Lab. )
Eriksen,L.M. ( MIT Lincoln Lab. )
Forte,A.R. ( MIT Lincoln Lab. )
Kunz,R.R. ( MIT Lincoln Lab. )
Lyszczarz,T.M. ( MIT Lincoln Lab. )
Stern,M.B. ( MIT Lincoln Lab. )
Nelson,C.M. ( Motorola and SEMATECH )
5 more
Publication title:
Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3333
Pub. Year:
1998
Vol.:
Part 1
Page(from):
634
Page(to):
642
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427786 [0819427780]
Language:
English
Call no.:
P63600/3333
Type:
Conference Proceedings

Similar Items:

Fritze,M., Wyatt,P.W., Astolfi,D.K., Davis,P., Curtis,A.V., Preble,D.M., Cann,S.G., Denault,S., Chan,D., Shaw,J.C., …

SPIE - The International Society for Optical Engineering

Forouhi,A.R., Li,G.G., Bloomer,I.

SPIE-The International Society for Optical Engineering

Carla M. Nelson-Thomas, Susan C. Palmateer, Anthony R. Forte, Susan G. Cann, S. Deneault

SPIE - The International Society of Optical Engineering

Zhong,T.X., Gurer,E., Lee,E., Bai,H., Gendron,B., Krishna,M.S., Reynolds,R.M.

SPIE - The International Society for Optical Engineering

Nelson,C.M., Palmateer,S.C., Lyszczarz,T.M.

SPIE-The International Society for Optical Engineering

Kunz,R.R., Palmateer,S.C., Forte,A.R., Allen,R.D., Wallraff,G.M., DiPietro,R.A., Hofer,D.C.

SPIE-The International Society for Optical Engineering

Sturtevant,J.L., Allgair,J., Fu,C.-C., Green,K.G., Hershey,R.R., Kling,M.E., Litt,L.C., Lucas,K.D., Roman,B.J., …

SPIE - The International Society for Optical Engineering

10 Conference Proceedings 193-nm lithography

Rothschild,M., Forte,A.R., Horn,M.W., Kunz,R.R., Palmateer,S.C., Sedlacek,J.H.C.

SPIE-The International Society for Optical Engineering

S.C. Palmateer, R.R. Kunz, M.W. Horn, A.R. Forte, M. Rothschild

Society of Photo-optical Instrumentation Engineers

Hsia,C.-C., Gau,T.-S., Yang,C.-H., Liu,R.-C., Chang,C.-H., Chen,L.-J., Wang,C.-M., Chen,J.F., Smith,B.W., Hwang,G.-W., …

SPIE - The International Society for Optical Engineering

Gerung,H., Chhagan,V.K., Yelehanka,P.R., Zhou,M.S., Hui,J.K.L.

SPIE - The International Society for Optical Engineering

DeBord,J.R.D., Jayaraman,V., Hewson,M.M., Lee,W.W., Ilzhoefer,J.R.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12