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Resist cluster formation model and development simulation

Author(s):
Kamon,K. ( Association of Super-Advanced Electronics Technologies (Japan) )
Nakazawa,K. ( Association of Super-Advanced Electronics Technologies (Japan) )
Yamaguchi,A. ( Association of Super-Advanced Electronics Technologies (Japan) )
Matsuzawa,N.N. ( Association of Super-Advanced Electronics Technologies (Japan) )
Ohfuji,T. ( Association of Super-Advanced Electronics Technologies (Japan) )
Sasago,M. ( Association of Super-Advanced Electronics Technologies (Japan) )
Kanzaki,K. ( Osaka Univ.(Japan) )
Tagawa,S. ( Osaka Univ.(Japan) )
3 more
Publication title:
Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3333
Pub. Year:
1998
Vol.:
Part 1
Page(from):
472
Page(to):
483
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427786 [0819427780]
Language:
English
Call no.:
P63600/3333
Type:
Conference Proceedings

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