Optimization of high-power excimer laser for TFT annealing

Optimization of high-power excimer laser for TFT annealing

Author(s):

Endert,H. ( Lambda Physik,Inc. )

Becker-de Mos,B. ( Lambda Physik Lasertechnik GmbH (Germany) )

Stamm,U. ( Lambda Physik Lasertechnik GmbH (Germany) )

Borneis,S. ( Lambda Physik Lasertechnik GmbH (Germany) )

Voｦﾂ,F. ( Lambda Physik Lasertechnik GmbH (Germany) )

Basting,D. ( Lambda Physik Lasertechnik GmbH (Germany) )

1 more

Publication title:

High-Power Laser Ablation

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3343

Pub. Year:

1998

Vol.:

Part 1

Page(from):

432

Page(to):

439

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427908 [081942790X]

Language:

English

Call no.:

P63600/3343

Type:

Conference Proceedings

Details

TDL ID:	ZA00018316
Series ID:	PA00000029
Conf. info. (Name):	High-Power Laser Ablation
Conf. info. (Number):	1998
Conf. info. (Venue):	Santa Fe, NM, USA
Conf. info. (Date):	1998.04.27-1998.04.30

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