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Transient measurement of surface deflection for beams and membranes in micromechanical devices

Author(s):
  • Klein,A. ( Technische Univ.Dresden (FRG) )
  • Schroth,A. ( Mechanical Engineering Lab. (Japan) )
  • Gerlach,G. ( Technische Univ.Dresden (FRG) )
  • Maeda,R. ( Mechanical Engineering Lab. (Japan) )
Publication title:
Third International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 16-19 June, 1998, Ancona, Italy
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3411
Pub. date:
1998
Page(from):
618
Page(to):
623
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819428639 [0819428639]
Language:
English
Call no.:
P63600/3411
Type:
Conference Proceedings

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