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Linkage design effect on the reliability of surface-micromachined microengines driving a load

Author(s):
Tanner,D.M. ( Sandia National Labs. )
Peterson,K.A. ( Sandia National Labs. )
Irwin,L.A. ( Sandia National Labs. )
Tangyunyong,P. ( Sandia National Labs. )
Miller,W.M. ( Sandia National Labs. )
Eaton,W.P. ( Sandia National Labs. )
Smith,N.F. ( Sandia National Labs. )
Rodgers,M.S. ( Sandia National Labs. )
3 more
Publication title:
Materials and Device Characterization in Micromachining
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3512
Pub. date:
1998
Page(from):
215
Page(to):
226
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429711 [0819429716]
Language:
English
Call no.:
P63600/3512
Type:
Conference Proceedings

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