Failure analysis of surface-micromachined microengines (Invited Paper)
- Author(s):
- Peterson,K.A. ( Sndia National Labs. )
- Tangyunyong,P. ( Sndia National Labs. )
- Pimentel,A.A. ( Sndia National Labs. )
- Publication title:
- Materials and Device Characterization in Micromachining
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3512
- Pub. Year:
- 1998
- Page(from):
- 190
- Page(to):
- 200
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429711 [0819429716]
- Language:
- English
- Call no.:
- P63600/3512
- Type:
- Conference Proceedings
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