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Silicon nitride deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposititon for micromachining applications

Author(s):
Publication title:
Materials and Device Characterization in Micromachining
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3512
Pub. Year:
1998
Page(from):
146
Page(to):
151
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429711 [0819429716]
Language:
English
Call no.:
P63600/3512
Type:
Conference Proceedings

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