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Fabrication and use of metal tip and tip-on-tip probes for AFM-based device analysis

Author(s):
  • Hantschel,T. ( Interuniv. Micro-Elektronica Ctr. vzw (Belgium) )
  • De Wolf,P. ( Interuniv. Micro-Elektronica Ctr. vzw (Belgium) )
  • Trenkler,T. ( Interuniv. Micro-Elektronica Ctr. vzw (Belgium) )
  • Stephenson,R. ( Interuniv. Micro-Elektronica Ctr. vzw (Belgium) )
  • Vandervorst,W. ( Katholieke Univ.Leuven (Belgium) )
Publication title:
Materials and Device Characterization in Micromachining
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3512
Pub. Year:
1998
Page(from):
92
Page(to):
103
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429711 [0819429716]
Language:
English
Call no.:
P63600/3512
Type:
Conference Proceedings

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