Design and fabrication of 128。゚128 diffractive microlens arrays on Si for PtSi focal plane arrays
- Author(s):
- Publication title:
- Detectors, focal plane arrays, and imaging devices II : 18-19 September 1998, Beijing, China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3553
- Pub. Year:
- 1998
- Page(from):
- 132
- Page(to):
- 137
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430144 [0819430145]
- Language:
- English
- Call no.:
- P63600/3553
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Design and fabrication of 128。゚128 diffractive microlens arrays on Si substrates
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Design and fabrication of 128 x 128 diffractive microlens arrays for infrared focal plane arrays
SPIE - The International Society for Optical Engineering |
8
Conference Proceedings
Method for improving performance of IR focal plane array using microlens array
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Design and fabrication of 256x256 diffractive microlens arrays on Si substrates
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Fabrication of microlens arrays with long focus for improving responsivity of PtSi IR detector array device
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
256×290 diffractive microlens array monolithic integration with PtSi focal plane array
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
6
Conference Proceedings
128。゚128-element silicon microlens array fabricated by ion-beam etching for PtSi IRCCD
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |