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FORMATION OF BURIED EPITAXIAL Co SILICIDES BY ION IMPLANTATION

Author(s):
Publication title:
Heterostructures on silicon : one step further with silicon
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
160
Pub. date:
1989
Page(from):
239
Page(to):
245
Pages:
7
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792301240 [0792301242]
Language:
English
Call no.:
N11482/160
Type:
Conference Proceedings

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