Blank Cover Image

Effect of Fe and Cu contamination on the reliability of ultrathin gate oxides

Author(s):
Publication title:
In-Line Methods and Monitors for Process and Yield Improvement
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3884
Pub. date:
1999
Page(from):
124
Page(to):
135
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434814 [0819434817]
Language:
English
Call no.:
P63600/3884
Type:
Conference Proceedings

Similar Items:

M. Wilson, A. Savtchouk, J. D'Amico, I. Tasarov, L. Jastrzebski

Electrochemical Society

Wilson,M., Lagowski,J., Sartchouk,A., Jastrzbski,L., D'Alnico,J., DeBusk,D.K., Buczkowski,A.

SPIE - The International Society for Optical Engineering

M. Wilson, A. Savtchouk, I. Tasarov, J. D'Amico, P. Edelman

Electrochemical Society

Iwamoto,T., Miyake,T., Ohmi,T.

SPIE-The International Society for Optical Engineering

Wilson, M., Lagowski, J., Savtchou, A., Marinskiy, D., Jastrzebski, L., D'Amico, J.

MRS-Materials Research Society

D'Amico L. L.

Society of Plastics Engineers, Inc. (SPE)

M. Wilson, D. Marinskiy, A. Byelyayev, J. D'Amico, A. Findlay, L. Jastrzebski, J. Lagowski

Electrochemical Society

D'Amico,L., D'Orazio,F., Dormann,J.L., Fiorani,D., Lucari,F., Tronc,E.

Trans Tech Publications

Marinskiy, D., Lagowski, J., Wilson, M., Savtchouk, A., Jastrzebski, L., DeBusk, D.

MRS-Materials Research Society

D'Amico,L., D'Orazio,F., Dormann,J.L., Fiorani,D., Lucari,F., Tronc,E.

Trans Tech Publications

D'Amico, John J.

American Chemical Society

Wristers, D., Wang, H.H., Han, L.K., Lin, C., Chen, T.S., Kwong, D.L., Fulford, J.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12