Integrated yield and CD enhancement for advanced DUV Lithography
- Author(s):
Krishna,M.S. ( Silicon Valley Group Inc. ) Gurer,E. Zhong,T.X. Lee,E. Salois,J.W. Reynolds,R.M. - Publication title:
- In-Line Methods and Monitors for Process and Yield Improvement
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3884
- Pub. Year:
- 1999
- Page(from):
- 56
- Page(to):
- 64
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434814 [0819434817]
- Language:
- English
- Call no.:
- P63600/3884
- Type:
- Conference Proceedings
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