Blank Cover Image

W-coating for MEMS

Author(s):
Publication title:
Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3874
Pub. date:
1999
Page(from):
150
Page(to):
157
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434715 [081943471X]
Language:
English
Call no.:
P63600/3874
Type:
Conference Proceedings

Similar Items:

Fleming,J.G., Mani,S.S., Lin,S.-Y.

SPIE-The International Society for Optical Engineering

7 Conference Proceedings Stress and curvature in MEMS mirrors

Gass, F. R., Dagel, D. J., Adams, D.P., Grossetete, G.D., Blum Spahn, O., Kemme, S.A., Mani, S.S., Malloy, K.J.

SPIE-The International Society for Optical Engineering

Mani, S. S., Fleming, J. G., Sniegowski, J. J., Boer, M. P. de, Irwin, L. W., Walraven, J. A., Tanner, D. M., LaVan, D. …

MRS-Materials Research Society

Resnick,P.J., Mani,S.S.

SPIE-The International Society for Optical Engineering

Mani, S. S., Fleming, J. G., Sniegowski, J. J., Boer, M. P. de, Irwin, L. W., Walraven, J. A., Tanner, D. M., Dugger, M. …

MRS-Materials Research Society

Smith,B.K., Brown,C.D., LaVigne,G., Sniegowski,J.J.

SPIE-The International Society for Optical Engineering

Barron,C.C., Fleming,J.G., Montague,S., Sniegowski,J.J., Hetherington,D.L.

SPIE-The International Society for Optical Engineering

Davies,B.R., Craig Barron,C., Sniegowski,J.J., Rodgers,M.S.

SPIE-The International Society for Optical Engineering

Sniegowski,J.J.

SPIE-The International Society for Optical Engineering

Sniegowski, J. J., Rodgers, S. M., Boone, B. G., Bruzzi, J. R., Drabenstadt, C. W., Kluga, B. E., Rogala, E. W., …

SPIE - The International Society of Optical Engineering

Walraven,J.A., Mani,S.S., Fleming,J.G., Headley,T.J., Kotula,P.G., Pimentel,A.A., Rye,M.J., Tanner,D.M., Smith,N.F.

SPIE-The International Society for Optical Engineering

Fleming,J.G.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12