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Reproducibility data on SUMMiT

Author(s):
Limary,S. ( Sandia National Labs. )
Stewart,H.
Irwin,L.W.
McBrayer,J.
Sniegowski,J.J.
Montague,S.
Smith,J.H.
Boer,M.P.de
Jakubczak,J.F.
4 more
Publication title:
Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3874
Pub. Year:
1999
Page(from):
102
Page(to):
112
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434715 [081943471X]
Language:
English
Call no.:
P63600/3874
Type:
Conference Proceedings

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