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Pulsed-laser-deposited coatings for stiction and wear reduction in MEMS devices

Author(s):
Pelt,J.S. ( Florida A&M Univ.and Florida State Univ )
Ramsey,M.E.
Magana,R.,Jr.
Poindexter,E.,Jr.
Boer,M.P.de
LaVan,D.A.
Dugger,M.T.
Smith,J.H.
Durbin,S.M.
4 more
Publication title:
Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3874
Pub. date:
1999
Page(from):
76
Page(to):
84
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434715 [081943471X]
Language:
English
Call no.:
P63600/3874
Type:
Conference Proceedings

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