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Assessment of a hypothetical road map that extends optical lithography through the 70-nm technology node

Author(s):
Petersen,J.S. ( Petersen Advanced Lithography )
McCallum,M.
Kachwala,N.
Socha,R.J.
Chen,J.F.
Laidig,T.L.
Smith,B.W.
Gordon,R.L.
Mack,C.A.
4 more
Publication title:
Lithography for semiconductor manufacturing : 19-21 May 1999, Edinburgh, Scotland
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3741
Pub. Year:
1999
Page(from):
73
Page(to):
89
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432216 [0819432210]
Language:
English
Call no.:
P63600/3741
Type:
Conference Proceedings

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