Process window overlap for posts and lines and spaces:optimization by resist type,optical settings,and mask bias
- Author(s):
- Reilly,M.T. ( Shipley Co.LLC )
- Kvam,K.
- Willie,J.
- Publication title:
- Lithography for semiconductor manufacturing : 19-21 May 1999, Edinburgh, Scotland
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3741
- Pub. Year:
- 1999
- Page(from):
- 40
- Page(to):
- 45
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819432216 [0819432210]
- Language:
- English
- Call no.:
- P63600/3741
- Type:
- Conference Proceedings
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