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Cross-beam pulsed laser deposition of ultrathin multilayer metal films

Author(s):
Publication title:
6th International Conference on Industrial Lasers and Laser Applications '98 : 27-29 June 1998, Shatura, Moscow Region, Russia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3688
Pub. date:
1999
Page(from):
351
Page(to):
358
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431622 [0819431621]
Language:
English
Call no.:
P63600/3688
Type:
Conference Proceedings

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