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Data of scattered electron characteristics in 1OO-kV EB stepper

Author(s):
Morita,K. ( Nikon Corp. )
Yahiro,T.
Shimizu,S.
Yamamoto,H.
Hirayanagi,N.
Fujiwara,T.
Suzuki,S.
Shimizu,H.
Kawata,S.
Okino,T.
Suzuki,K.
6 more
Publication title:
Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3997
Pub. Year:
2000
Page(from):
703
Page(to):
712
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436153 [0819436151]
Language:
English
Call no.:
P63600/3997
Type:
Conference Proceedings

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