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Optimization of DUV chemically amplified resist platforms for SCALPEL e-beam exposure

Author(s):
Ocola,L.E. ( Lucent Technologies/Bell Labs. )
Blakey,M.I.
Orphanos,P.A.
Li,W.-Y.
Novembre,A.E.
Brainard,R.L.
Mackevich,J.F.
Taylor,G.N.
3 more
Publication title:
Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3997
Pub. Year:
2000
Page(from):
194
Page(to):
203
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436153 [0819436151]
Language:
English
Call no.:
P63600/3997
Type:
Conference Proceedings

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