Blank Cover Image

Dry etching to form submicron features in CMR oxides: (Pr, Ba,Ca)MnO3 and (La,Sr)MnO3

Author(s):
Lee, K. P.
Jung, K. B.
Cho, H.
Kumar, D.
Pietambaram, S. V.
Singh, R. K.
Hogan, P. H.
Dahmen, K. H.
Hahn, Y. B.
Pearton, S. J.
5 more
Publication title:
Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
574
Pub. Year:
1999
Page(from):
341
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994812 [1558994815]
Language:
English
Call no.:
M23500/574
Type:
Conference Proceedings

Similar Items:

Wang, J. J., Jung, K. B., Childress, J. R., Pearton, S. J., Sharifi, F., Dahmen, K. H., Gillman, E. S., Cadieu, F. J., …

MRS - Materials Research Society

Hays, D.C., Abernathy, C.R., Hobson, W.S., Pearton, S.J., Han, J., Shul, R.J., Cho, H., Jung, K.B., Ren, F., Hahn, Y.B.

Materials Research Society

Lee, K. P., Jung, K. B., Srivastava, A., Kumar, D., Singh, R. K., Pearton, S. J.

MRS-Materials Research Society

Cho, H., Hahn, Y. B., Hays, D. C., Jung, K. B., Donovan, S. M., Abernathy, C. R., Pearton, S. J., Shul, R. J.

MRS - Materials Research Society

3 Conference Proceedings Dry Etching of MRAM Structures

Pearton, S.J., Cho, H., Jung, K.B., Childress, J.R., Sharifi, F., Marburger, J.

Materials Research Society

Dahmen, K. H., Hogan, P. C., Mateeva, N. N.

Materials Research Society

Kumar, D., Pietambaram, Srinivas V., Singh, Rajiv K., Lee, C. B.

MRS - Materials Research Society

Lee, K. P., Cho, H., Singh, R. K., Pearton, S. J., Hobbs, C., Tobin, P.

MRS-Materials Research Society

Cho, H., Lee, K. P., Jung, K. B., Sharifi, F., Marburger, J., Pearton, S. J.

MRS-Materials Research Society

Pietambaram, Srinivas V., Kumar, D., Singh, Rajiv K., Lee, C. B.

MRS - Materials Research Society

Pietambaram, Srinivas V., Kumar, D., Singh, Rajiv K., Lee, C.B.

Materials Research Society

Kumar, D., Lee, C. B., Pietambaram, S. V., Singh, R. K.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12