Silicon-oxynitride (SiON) for photonic integrated circuits

Silicon-oxynitride (SiON) for photonic integrated circuits

Author(s):

Publication title:

Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

574

Pub. Year:

1999

Page(from):

255

Pub. info.:

Warrendale, PA: MRS-Materials Research Society

ISSN:

02729172

ISBN:

9781558994812 [1558994815]

Language:

English

Call no.:

M23500/574

Type:

Conference Proceedings

Details

TDL ID:	ZA00018052
Series ID:	PA00000011
Conf. info. (Name):	Multicomponent Oxide Films for Electronics : Symposium
Conf. info. (Number):	1999
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1999.04.06-1999.04.08

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