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Stress and deformation of PZT thin film on silicon wafer due to thermal expansion

Author(s):
Publication title:
Multicomponent oxide films for electronics : symposium held April 6-8, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
574
Pub. Year:
1999
Page(from):
107
Pub. info.:
Warrendale, PA: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994812 [1558994815]
Language:
English
Call no.:
M23500/574
Type:
Conference Proceedings

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