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New Photoresist Processes at UV Wavelengths Less Than 200 Nanometers

Author(s):
Publication title:
Irradiation of polymeric materials : processes, mechanisms, and applications
Title of ser.:
ACS symposium series
Ser. no.:
527
Pub. Year:
1993
Page(from):
266
Pub. info.:
Washington, DC: American Chemical Society
ISSN:
00976156
ISBN:
9780841226623 [0841226628]
Language:
English
Call no.:
A05800/527
Type:
Conference Proceedings

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