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Organic Resist Materials-Theory and Chemistry

Author(s):
Willson, C. Grant  
Publication title:
Introduction to microlithography : theory, materials, and processing
Title of ser.:
ACS symposium series
Ser. no.:
219
Pub. Year:
1983
Page(from):
87
Pub. info.:
Washington, D.C.: American Chemical Society
ISSN:
00976156
ISBN:
9780841207752 [0841207755]
Language:
English
Call no.:
A05800/219
Type:
Conference Proceedings

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