Blank Cover Image

EFFECTS OF POST ETCH TREATMENTS ON CONTAMINATED SILICON SURFACE DUE TO CHF3/C2F6 REACTIVE ION ETCHING

Author(s):
Park, H.-H.
Kwon, K.-H.
Lee, S.-H.
Nahm, S.
Lee, J.-W.
Koak, B.-H.
Suh, K.-S.
Kwon, O.-J.
Lee, J.-L.
Yeom, G.-Y.
5 more
Publication title:
Surface chemical cleaning and passivation for semiconductor processing
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
315
Pub. date:
1993
Page(from):
243
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992139 [1558992138]
Language:
English
Call no.:
M23500/315
Type:
Conference Proceedings

Similar Items:

Park, H.-H., Kwon, K.H., Koak, B.-H., Lee, S.-M., Kwon, O-J., Kim, B.-W., Lee, J.-W., Yoo, J.-B., Sung, Y.-K.

Materials Research Society

Pan, W-S., Steckl, A.J.

Materials Research Society

Kwon, Kwang-Ho, Kim, Bo-Woo, Park, Hyung-Ho, Kang, Jin-Yeong, Yeom, Gun-Yung

MRS - Materials Research Society

Park, C. I., Kang, J. H., Kim, K. C., Lim, K. Y., Suh, E.-K., Nahm, K. S.

Materials Research Society

Cho, H., Lee, K. P., Jung, K. B., Sharifi, F., Marburger, J., Pearton, S. J.

MRS-Materials Research Society

Lee, K.S., Lee, S.H., Kim, M., Nahm, K.S.

Trans Tech Publications

Choi, S.-J., Cha, H.-S., Yoon, S.-Y., Kim, Y.-D., Lee, D.-H., Kim, J.-M., Kim, J.-S., Min, D.-S., Jang, P.-J., Chang, …

SPIE-The International Society for Optical Engineering

Shim,H.W., Kim,K.C., Seo,Y.H., Nahm,K.S., Suh,E.-K., Lee,H.J., Hwang,Y.G.

Trans Tech Publications

Puttock, M. S., Thomas, H., Morgan, D. V., Rossow, U., Zahn, D. R. T., Richter, W., Hilton, K. P., Woodward, J.

Materials Research Society

Sieber,N., Ristein,J., Ley,L.

Trans Tech Publications

Ho, C.N., Higelin, G., Low, C.H., See, A., Chan, L., Chua, D.H.C.

Electrochemical Society

Nahm, K.S., Seo, Y.H., Suh, E.-K., Lee, Y.H., Lee, H.J., Hwang, Y.G.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12