PREPARATION OF InP SURFACES FOR EPITAXIAL GROWTH AND REGROWTH

PREPARATION OF InP SURFACES FOR EPITAXIAL GROWTH AND REGROWTH

Author(s):

Publication title:

Surface chemical cleaning and passivation for semiconductor processing

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

315

Pub. Year:

1993

Page(from):

139

Pub. info.:

Pittsburgh, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992139 [1558992138]

Language:

English

Call no.:

M23500/315

Type:

Conference Proceedings

Details

TDL ID:	ZA00018004
Series ID:	PA00000011
Conf. info. (Name):	Symposium on surface chemical cleaning and passivation for semiconductor processing ; Materials Research Society Spring Meeting
Conf. info. (Number):	1993
Conf. info. (Venue):	San Francisco, California, USA
Conf. info. (Date):	1993.04.13-1993.04.15

Similar Items:

1 Conference Proceedings In Situ Control during Growth of SiO2 Films on InP by ECR Plasma Joseph, J., Besland, M.P., Callard, S., Gagnaire, A., Lambrinos, M., Hollinger, G. Electrochemical Society	7 Conference Proceedings Epitaxial Growth and Processing of InP Films in a Novel Remote Plasma-MOCVD Apparatus Bruno,G., Losurdo,M., Capezzuto,P., Capozzi,V., Lorusso,F.G., Minafra,A. Trans Tech Publications
2 Conference Proceedings NIR resonant-cavity-enhanced InP/InGaAs strained quantum well interband photodetector Jourba,S., Besland,M.-P., Gendry,M., Garrigues,M., Leclercq,J.-L., Rojo-Romeo,P., Viktorovitch,P., Cortial,S., Hugon,X., … SPIE - The International Society for Optical Engineering	8 Conference Proceedings Effects of YTTERBIUM addition on liquid phase epitaxial growth of InGaAs/InP heterostructures Davis, A., Dauplaise, H. M., Lorenzo, J. P., Ramseyer, G. O., Horrigan, J. A. MRS - Materials Research Society
3 Conference Proceedings Photoluminescence Temperature and Polarization Dependent Studies of InAs Quantum Dots Grown on InP(001) by MBE Olivares, J., Gendry, M., Bremond, G., Salem, B., Benyattou, T., Brault, J., Hollinger, G., Marty, O., Pitaval, M. Materials Research Society	9 Conference Proceedings InP-based micromechanical tunable and selective photodetector for WDM systems Seassal,C., Leclercq,J.-L., Letartre,X., Gagnaire,A., Gendry,M., Viktorovitch,P., Laine,J.P., Sidoroff,F., Dantec,R.Le, … SPIE-The International Society for Optical Engineering
4 Conference Proceedings INFLUENCE OF GROWTH CONDITIONS ON THE MODULATION MECHANISM OF PHOTOREFLECTANCE SPECTRA OF SINGLE InGaAs/InAlAs QUANTUM WELLS Baltagi, Y., Bru, C., Benyattou, T., Gracia-Perez, M. A., Guillot, G., Gendry, M., Leclercq, J. L., Drouot, V., … MRS - Materials Research Society	10 Conference Proceedings EPITAXIAL GROWTH OF InP ON Si BY MOCVD Konushi, F., Seki, A., Kudo, J., Sato, H., Kakimoto, S., Fukushima, T., Kubota, Y., Koba, M. Materials Research Society
5 Conference Proceedings Regrowth in High-Performance InP-based DHPT Devices Grambin, V., Mensa, D., Lange, M., Cavus, A., Chang, P. C., Sawdai, D., Block, T., Gutierrez-Aitken, A., Oki, A. Electrochemical Society	11 Conference Proceedings Thickness and composition monitoring of thin layers of InGaAs in InP/InGaAsP epitaxial growths using FESEM and integrated SIMS profiles Masson, D.P., Humphreys, B., Robertson, M. SPIE - The International Society of Optical Engineering
6 Conference Proceedings Optical characterization methods of InP-based micro-opto-electro-mechanical systems Dantec,R.Le, Benyattou,T., Guillot,G., Seassal,C., Leclercq,J.-L., Letartre,X., Gagnaire,A., Gendry,M., Viktorovitch,P., … SPIE-The International Society for Optical Engineering	12 Conference Proceedings Strength of indium-phosphide-based microstructures Greek,S., Hjort,K., Schweitz,J.-A., Seassal,C., Leclercq,J.-L., Gendry,M., Besland,M.-P., Viktorovitch,P., Figuet,C., … SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12